“Conventional ion sources use a tungsten filament to inject the gas containing the dopant with electrons.”

“A thin oxide spacer is used to displace P-type dopant implantation to P-type shallow source and drain extension junctions.”

“Due to the original content of the iron dopant and the size of the resist pattern, the diameter of the particle can be effectively controlled well below the lithography limit.”

“The cells are doped with N type dopants by using the photo-resist regions as masks.”

“Essentially, the losses introduced by the microstructure should not exceed the reduction in loss we achieve by eliminating dopants and therefore reducing material scattering.”

“The new materials include dielectrics and dopants, which are commonly used in high-volume semiconductor manufacturing.”