| Particular embodiments of both methods may be applied to fabricating microelectromechanical systems especially MEMS mirrors. |
| The gyroscopes sense angular motion by measuring the Coriolis effect induced by rotation, using a vibrating MEMS structure. |
| The MEMS transducer is a condenser microphone with a flexible poly-Si membrane and a rigid reference electrode manufactured on SOI substrate. |
| Cronos, originally a commercial spin-off of MCNC, was acquired by JDS Uniphase in April 2000 as a platform for its MEMS business unit. |
| Karl Suss is a global supplier of manufacturing equipment and process technology for advanced packaging, microelectronics and MEMS market. |
| It is ramping up a 6in line dedicated to MEMS at its Castelleto fab, according to Benedetto Vigna, the MEMS unit manager. |
