| The barrier may be a thin film containing at least one of a nitride, oxide, boride, silicide, carbide and aluminide. |
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| A hard mask layer comprising tungsten silicide is formed over the first barrier layer. |
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| The metal layer which is not transformed into a metal silicide overlying the dielectric spacers and shallow trench isolation regions is removed. |
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| The new technology features a minimum number of process changes, such as strained silicon and a new nickel silicide, to shorten time to volume. |
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| A key innovation is the use of sodium silicide to liberate hydrogen from water as needed by the hybrid fuel cell. |
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| These power packs, which contain sodium silicide, don't degrade over time, and when you add water, they produce the hydrogen needed for the conversion to electricity. |
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| According to the company, sodium silicide is a safe, air-stable reactive metal powder that produces hydrogen at about half the pressure of a soda can. |
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