| If a maximum permissible residual gas pressure is exceeded, the electron source is automatically shut down and a gettering process is activated. |
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| Much has been written about gettering in the last 25 years or so, but in essence it all boils down to this. |
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| When the gettering medium becomes oxidized, it no longer removes the oxygen from the gas stream. |
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| Differences in the gettering of Cu and Fe impurities at various types of structural defects are demonstrated on the basis of such a discussion. |
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| Those oxygen precipitates then act as gettering sites for metallic impurities. |
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| However, the need for gettering of mobile ions has not been removed. |
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| This indicates that the mechanism of iron gettering is associated with relaxation gettering by silicon oxide precipitates. |
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| This technique is based on well-known phosphorous gettering. |
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| Most often, the formation of PS can create defects in the surface of the Si substrate that may enhance the gettering effect as extrinsic gettering effect. |
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| The applied gettering treatments were found to be inefficient to improve the device performance, possibly due to stronger gettering to heavily doped, ion implantation damaged device layer. |
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| We believe this butterfly is the only gettering process which can work in times on the order of seconds,' says Lagowski. |
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| Gettering time is depending of gas purity. |
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| Int'l Autumn Meeting on Gettering and Defect Engineering in Semiconductor. |
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