| The nozzle plate is now constructed using silicon oxide MEMS production technology with anisotropic etching for greater robustness and accuracy. |
| It is ramping up a 6in line dedicated to MEMS at its Castelleto fab, according to Benedetto Vigna, the MEMS unit manager. |
| The gyroscopes sense angular motion by measuring the Coriolis effect induced by rotation, using a vibrating MEMS structure. |
| Cronos, originally a commercial spin-off of MCNC, was acquired by JDS Uniphase in April 2000 as a platform for its MEMS business unit. |
| Particular embodiments of both methods may be applied to fabricating microelectromechanical systems especially MEMS mirrors. |
| I should be very sorry to lose it, for there were in it some botanical mems. |
